Relation Between Local Composition, Chemical Environment and Phase Shift Behavior in Cr-Based Oxycarbonitride Thin Films

Relation Between Local Composition, Chemical Environment and Phase Shift Behavior in Cr-Based Oxycarbonitride Thin Films

著者名:

掲載資料名:

Nonlithographic and lithographic methods of nanofabrication--from ultralarge-scale integration to photonics to molecular electronics : symposium held November 26-December 1, 2000, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

636

発行年:

2001

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995468 [1558995463]

言語:

英語

請求記号:

M23500/636

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014523
シリーズID:	PA00000011
会議名:	Symposium on nonlithographic and lithographic methods of nanofabrication
回次:	2000
会議開催地:	Boston, MA, USA
会議開催年:	2000.11.26-2000.12.01

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