PECVD Grown Hydrogenated Polymorphous Silicon Studied Using Current Transient Spectroscopies in PIN Diodes
- 著者名:
- 掲載資料名:
- Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 862
- 発行年:
- 2005
- 開始ページ:
- 537
- 終了ページ:
- 542
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558998155 [1558998152]
- 言語:
- 英語
- 請求記号:
- M23500/862
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Trans Tech Publications |
Materials Research Society | |
MRS - Materials Research Society | |
MRS - Materials Research Society |
Materials Research Society |
5
国際会議録
Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz
Materials Research Society |
Materials Research Society |
Trans Tech Publications |
MRS - Materials Research Society |