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Experimental Study of Silane Plasma Nanoparticle Formation in Amorphous Silicon Thin Films

著者名:
Thompson, S.
Perrey, C.R.
Belich, T.J.
Blackwell, C.
Carter, C.B.
Kakalios, J.
Kortshagen, U.
さらに 2 件
掲載資料名:
Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
862
発行年:
2005
開始ページ:
313
終了ページ:
318
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998155 [1558998152]
言語:
英語
請求記号:
M23500/862
資料種別:
国際会議録

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