Application of Field-Enhanced Rapid Thermal Annealing to Activation of Doped Polycrystalline Si Thin Films
- 著者名:
So, B.S. You, Y.H. Kirn, H.J. Kim, Y.H. Hwang, J.H. D.H. Shin, Ryu, S.R. Choi, K. Kim, Y.C. - 掲載資料名:
- Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 862
- 発行年:
- 2005
- 開始ページ:
- 275
- 終了ページ:
- 280
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558998155 [1558998152]
- 言語:
- 英語
- 請求記号:
- M23500/862
- 資料種別:
- 国際会議録
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