A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition for Photovoltaic Devices

A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition for Photovoltaic Devices

著者名:

掲載資料名:

Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

862

発行年:

2005

開始ページ:

171

終了ページ:

176

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558998155 [1558998152]

言語:

英語

請求記号:

M23500/862

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014506
シリーズID:	PA00000011
会議名:	MRS Spring Meeting
回次:	2005
会議開催地:	San Francisco, California, U.S.A.
会議開催年:	2005.03.28-2005.04.01

類似資料:

1 国際会議録 A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-Wire Chemical Vapor Deposition Richardson, Christine E., Mason, Maribeth S., Atwater, Harry A. Materials Research Society	7 国際会議録 Hot-Wire Chemical Vapor Deposition for Epitaxial Silicon Growth on Large-Grained Polycrystalline Silicon Templates Mason, M. S., Chen, C. M., Atwater, H. A. Materials Research Society
2 国際会議録 Roughness, Impurities and Strain in Low-Temperature Epitaxial Silicon Films Grown by Tantalum Filament Hot-Wire Chemical Vapor Deposition Charles W. Teplin, Matthew W. Page, Eugene W. Iwaniczko, Kim M. Jones, Robert M. Ready, Bobby M. To, Helio M. Moutinho, … Materials Research Society	8 国際会議録 The Use of Electron Channeling Patterns for Process Optimization of Low-Temperature Epitaxial Silicon Using Hot-Wire Chemical Vapor Deposition Matson, R., Thiesen, J., Jones, K. M., Crandall, R., Iwaniczko, E., Mahan, H. MRS - Materials Research Society
3 国際会議録 High Hydrogen Content Silicon Nitride For Photovoltaic Applications Deposited By Hot-Wire Chemical Vapor Deposition Holt, Jason K., Swiatek, Maribeth, Goodwin, David G., Atwater, Harry A. Materials Research Society	9 国際会議録 The Effect Of Aging On Tungsten Filament Surface Kinetics In Hot-Wire Chemical Vapor Deposition Of Silicon Holt, Jason K., Swiatek, Maribeth, Goodwin, David G., Atwater, Harry A. Materials Research Society
4 国際会議録 6cj. Towards Solid State Silicon Nano and Microwire Photovoltaic Devices Michael A. Filler, Brendan M. Kayes, Morgan C. Putnam, Michael D. Kelzenberg, Harry A. Atwater American Institute of Chemical Engineers	10 国際会議録 Gas Phase and Surface Kinetic Processes in Polycrystalline Silicon Hot-Wire Chemical Vapor Deposition Holt, J.K., Swiatek, M., Goodwin, D.G., Atwater, H.A., Muller, R.P., Goddard, W.A., III Electrochemical Society
5 国際会議録 311b. Fabrication and Optical Characterization of Large-Area, Vertically Aligned Arrays of Silicon Nano and Microwires for Photovoltaic Devices Michael A. Filler, Brendan M. Kayes, Michael D. Kelzenberg, Morgan C. Putnam, Harry A. Atwater American Institute of Chemical Engineers	11 国際会議録 Quantitative Modeling of Nucleation Kinetics in Experiments For Poly-Si Growth on SiO2 By Hot-Wire Chemical Vapor Deposition Swiatek, Maribeth, Holt, Jason K., Atwater, Harry A. Materials Research Society
6 国際会議録 Gas Phase And Surface Kinetic Processes In Hot-Wire Chemical Vapor Deposition Atwater, H. A., Goodwin, D. G., Holt, J. K., Swiatek, M. Materials Research Society	12 国際会議録 The Growth of Homoepitaxial Silicon at Low Temperatures Using Hot Wire Chemical Vapor Deposition Thiesen, J., Jones, K. M., Matson, R., Reedy, R., Iwaniczko, E., Mahan, H., Crandall, R. MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12