Effect of Deposition Temperature and Post-Heat-Treatment Conditions on the Characteristics of (100)-Self-Orientation LaNiO3 Films Prepared by RF Magnetron Sputter Deposition
- 著者名:
- 掲載資料名:
- Materials, integration and packaging issues for high-frequency devices
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 833
- 発行年:
- 2004
- 開始ページ:
- 35
- 終了ページ:
- 40
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997813 [1558997814]
- 言語:
- 英語
- 請求記号:
- M23500/833
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
11
国際会議録
In2O3 Based Multicomponent Oxide Transparent Conducting Films Prepared by R.F. Magnetron Sputtering
Materials Research Society |
Editorial Office of Trans. NFsoc., Central-South University of Technology |
MRS-Materials Research Society |