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Excimer (XeCl) Laser Annealing of PbZr0.52Ti0.48O3 Thin Film at Low Temperature for TFT FRAM Application

著者名:
掲載資料名:
Materials and processes for nonvolatile memories : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
830
発行年:
2005
開始ページ:
159
終了ページ:
164
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997783 [1558997784]
言語:
英語
請求記号:
M23500/830
資料種別:
国際会議録

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