Effects of the Substrate on the Determination of Hardness of Thin Films by the Nanoscratch and Nanoindentation Techniques: A Comparative Study for the Cases of Soft Film on Hard Substrate and Hard Film on Soft Substrate

Effects of the Substrate on the Determination of Hardness of Thin Films by the Nanoscratch and Nanoindentation Techniques: A Comparative Study for the Cases of Soft Film on Hard Substrate and Hard Film on Soft Substrate

著者名:

掲載資料名:

Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

795

発行年:

2002

開始ページ:

295

終了ページ:

300

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997332 [1558997334]

言語:

英語

請求記号:

M23500/795

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014467
シリーズID:	PA00000011
会議名:	Symposium on thin films
回次:	10th
会議開催地:	Boston, MA, USA
会議開催年:	2003.12.01-2003.12.05

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