Investigation of Mechanical Integrity and Its Effect on Polishing for Novel Polyurethane Polishing Pad
- 著者名:
Zantye, Parshuram Mudhivarthi, S. Sikder, A.K. Kumar, Ashok Ostapenko, S. Harmon, Julie - 掲載資料名:
- Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 816
- 発行年:
- 2004
- 開始ページ:
- 113
- 終了ページ:
- 118
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997660 [1558997660]
- 言語:
- 英語
- 請求記号:
- M23500/816
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
10
国際会議録
Effect of Slurry Temperature on Cu Chemical Mechanical Polishing with Different Oxidizing Agents
Materials Research Society |
Materials Research Society |
11
国際会議録
Investigation of Structural and Mechanical Properties of Laser Deposited Microlaminate Hard Coatings
Materials Research Society |
Electrochemical Society |
Materials Research Society |