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Characterization and Comparison of 4H-SiC(1120) and 4H-SiC(0001)8° Off-Axis Substrates and Homoepitaxial Films

著者名:
Bishop, S.M.
Preble, E.A.
Hallin, C.
Henry, A.
Sarney, W.
Chang, H.-R.
Storasta, L.
Jacobson, H.
Reitmeier, Z.J.
Wagner, B.P.
Janzen, E.
Davis, R.F.
さらに 7 件
掲載資料名:
Silicon carbide 2004--materials, processing and devices : symposium held April 14-15, 2004, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
815
発行年:
2004
開始ページ:
53
終了ページ:
58
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997653 [1558997652]
言語:
英語
請求記号:
M23500/815
資料種別:
国際会議録

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