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Impact of Hydrogen Plasma Treatment on Gettering by He Implantation-Induced Cavities in Silicon

著者名:
掲載資料名:
Hydrogen in semiconductors : symposium held April 13-14, 2004, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
813
発行年:
2004
開始ページ:
55
終了ページ:
60
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997639 [1558997636]
言語:
英語
請求記号:
M23500/813
資料種別:
国際会議録

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