Chemical Routes to Improved Mechanical Properties of PECVD Low-k Thin Films
- 著者名:
Bilodeau, S.M. Borovik, A.S. Ebbing, A.A. Vestyck, D.J. Xu, C. Roeder, J.F. Baum, T.H. - 掲載資料名:
- Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 812
- 発行年:
- 2004
- 開始ページ:
- 109
- 終了ページ:
- 116
- 総ページ数:
- 8
- 出版情報:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997622 [1558997628]
- 言語:
- 英語
- 請求記号:
- M23500/812
- 資料種別:
- 国際会議録
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