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Fundamental Study and Oxide Reliability of the MBE-Grown Ga2-xGdxO3 Dielectric Oxide for Compound Semiconductor MOSFETs

著者名:
Kwo, J.
Hong, M.
Mannaerts, J.P.
Lee, Y.J.
Wu, Y.D.
Lee, W.G.
Milkap, S.
Yang, B.
Gustaffson, T.
さらに 4 件
掲載資料名:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
811
発行年:
2004
開始ページ:
359
終了ページ:
364
総ページ数:
6
出版情報:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997615 [155899761X]
言語:
英語
請求記号:
M23500/811
資料種別:
国際会議録

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