Effects of Structural Properties of Hf-Based Gate Stack on Transistor Performance
- 著者名:
Bersuker, G. Sim, J.H. Young, C.D. Choi, R. Lee, B.H. Lysaght, P. Brown, G.A. Zeitzoff, P.M. Gardner, M. Murto, R.W. Huff, H.R. - 掲載資料名:
- Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 811
- 発行年:
- 2004
- 開始ページ:
- 31
- 終了ページ:
- 36
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997615 [155899761X]
- 言語:
- 英語
- 請求記号:
- M23500/811
- 資料種別:
- 国際会議録
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