Measurements of Ultra-Shallow Junction (USJ) Sheet Resistance With a Non-Penetrating Four Point Probe

Measurements of Ultra-Shallow Junction (USJ) Sheet Resistance With a Non-Penetrating Four Point Probe

著者名:

Hillard, Robert J.

Mazur, Robert G.

Alexander, William J.

掲載資料名:

Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

810

発行年:

2004

開始ページ:

463

終了ページ:

468

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997608 [1558997601]

言語:

英語

請求記号:

M23500/810

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014452
シリーズID:	PA00000011
会議名:	Symposium on silicon front-end junction formation
回次:	2004
会議開催地:	San Francisco, CA, USA
会議開催年:	2004.04.13-2004.04.15

類似資料:

1 国際会議録 Accurate Sheet Resistance Measurement on Ultra-Shallow Profiles Trudo Clarysse, Alain Moussa, Frederik Leys, Roger Loo, Wilfried Vandervorst, Mark C. Benjamin, Robert J. Hillard, … Materials Research Society	7 国際会議録 Ultra Shallow Junctions Optimization With Non-Doping Species Co-Implantation Nathalie Cagnat, Cyrille Laviron, Daniel Mathiot, Blandine Duriez, Julien Singer, Romain Gwoziecki, Frederic Salvetti, … Materials Research Society
2 国際会議録 Non-Contact Electrical Measurements of Sheet Resistance and Leakage Current Density for Ultra-Shallow (and Other) Junctions Faifer, Vladimir N., Current, Michael I., Walecki, Wojtek, Soucnkov, Vitali, Mikhaylov, Georgy, Van, Phuc, Wong, Tim, … Materials Research Society	8 国際会議録 Comparison of Ion-Implanted and Gas-Diffused Base Layers in Ultra-High Speed BJTs Using Advanced Spreading Resistance Profiling and Analysis Weinzierl, S.R., Hillard, R.J., Heddleson, J.M., Mazur, R.G., Onai, T., Kiyota, Y. Electrochemical Society
3 国際会議録 Low Temperature Shallow Junction Formation For 70Nm Technology Node And Beyond Borland, John O. Materials Research Society	9 国際会議録 Thick Film Ceramic Capacitors and Resistors inside Printed Circuit Boards Borland, William, Felten, John J. IMAPS
4 国際会議録 Non-Destructive Therma-Probe Measurements on Annealed Ultra-Shallow Junction Samples Cherekdjian, S., Nicolaides, L., Bakshi, M. Electrochemical Society	10 国際会議録 Ultra Shallow Junctions: Formation, Characterization, and Modeling Osburn, C.M., Chevacharoenkul, S., Wang, Q.F., Tsai, J.Y., Cowen, A., Rose, J., Zhang, X., Kellam, M. Electrochemical Society
5 国際会議録 Mechanism of Dopant Activation Enhancement in Shallow Junctions by Hydrogen Vengurlekar, A., Ashok, S., Kalnas, Christine E., Ye, Win Materials Research Society	11 国際会議録 (11.5) 4:40 - 5:00 PM - Ge & Ge+B Infusion Doping and Deposition for Ultra-shallow Junction, Blanket and Localized SiGe or Ge Formation on Cz and SOI Wafers Borland, J., Hautala, J., Tabat, M., Gwinn, M., Tetreault, T., Skinner, W.(J.O.B. Technologies) Electrochemical Society
6 国際会議録 Fabrication of p+/n Ultra-Shallow Junctions (USJ) in Silicon by Excimer Laser Doping From Spin-On Glass Sources Coutanson, S., Fogarassy, E., Venturini, J. Materials Research Society	12 国際会議録 Reproducibility of Nano- and Micro-Scale Multi-Point Probe Sheet Resistance Measurements Petersen, Christian L., Worledge, Daniel, Petersen, Peter R.E. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12