Characterization of Porous Silicate Low-k Films by Ellipsometric Porosimetry and Variable-Energy Positron Annihilation Spectroscopy | 東京工業大学附属図書館文献データベース

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Characterization of Porous Silicate Low-k Films by Ellipsometric Porosimetry and Variable-Energy Positron Annihilation Spectroscopy

著者名:

Kobayashi, Yoshinori

Suzuki, Ryoichi

Ohdaira, Toshiyuki

Hirata, Kouichi

Togashi, Hisashi

Nakashima, Akira

Komatsu, Michio

さらに 7 件

掲載資料名:

Continuous nanophase and nanostructured materials : symposium held December 1-5, 2003, Boston, Masachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

788

発行年:

2004

開始ページ:

397

終了ページ:

402

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997264 [1558997261]

言語:

英語

請求記号:

M23500/788

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014445
シリーズID:	PA00000011
会議名:	Symposium on continuous nanophase and nanostructured materials
回次:	2003
会議開催地:	Boston, MA, USA
会議開催年:	2003.12.01-2003.12.05

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