Characterization of Porous Silicate Low-k Films by Ellipsometric Porosimetry and Variable-Energy Positron Annihilation Spectroscopy
- 著者名:
Ito, Kenji Kobayashi, Yoshinori Suzuki, Ryoichi Ohdaira, Toshiyuki Yu, Runsheng Sato, Kiminori Hirata, Kouichi Togashi, Hisashi Egami, Miki Arao, Hiroki Nakashima, Akira Komatsu, Michio - 掲載資料名:
- Continuous nanophase and nanostructured materials : symposium held December 1-5, 2003, Boston, Masachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 788
- 発行年:
- 2004
- 開始ページ:
- 397
- 終了ページ:
- 402
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997264 [1558997261]
- 言語:
- 英語
- 請求記号:
- M23500/788
- 資料種別:
- 国際会議録
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