Mechanical Modeling of the 2D Interfacial Slurry Pressure in CMP
- 著者名:
Higgs III, C. Fred Ng, Sum Huan Yoon, Inho Shan, Lei Yap, Lipkong Danyluk, Steven - 掲載資料名:
- Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 767
- 発行年:
- 2003
- 開始ページ:
- 305
- 終了ページ:
- 312
- 総ページ数:
- 8
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997042 [1558997040]
- 言語:
- 英語
- 請求記号:
- M23500/767
- 資料種別:
- 国際会議録
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