Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz

Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz

著者名:

Aguas, H.

Raniero, L.

Pereira, L.

Fortunato, E.

Cabarrocas, P. Roca i

Martins, R.

さらに 1 件

掲載資料名:

Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

762

発行年:

2003

開始ページ:

589

終了ページ:

594

総ページ数:

6

出版情報:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558996991 [1558996990]

言語:

英語

請求記号:

M23500/762

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014420
シリーズID:	PA00000011
会議名:	Symposium on amorphous and nanocrystalline silicon-based films
回次:	2003
会議開催地:	San Francisco, CA, USA
会議開催年:	2003.04.22-2003.04.25

類似資料:

1 国際会議録 Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz Martins, R., Aguas, H., Ferreira, I., Fortunato, E., Raniero, L., Roca i Cabarrocas, P. Trans Tech Publications	7 国際会議録 Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications Pereira, L., Aguas, H., Igreja, R., Martins, R.M.S., Nedev, N., Raniero, L., Fortunato, E., Martins, R. Trans Tech Publications
2 国際会議録 MIS Photodiodes of Polymorphous Silicon Deposited at Higher Growth Rates by 27.12 MHz PECVD Discharge Aguas, H., Pereira, L., Raniero, L., Fortunato, E., Martins, R. Trans Tech Publications	8 国際会議録 Silicon Films Produced by PECVD under Powder Formation Conditions Martins, R., Aguas, H., Silva, V., Ferreira, I., Cabrita, A., Fortunato, E. Trans Tech Publications
3 国際会議録 Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz Raniero, L., Martins, R., Aguas, H., Zang, S., Ferreira, I., Pereira, L., Fortunato, E., Boufendi, L. Trans Tech Publications	9 国際会議録 Effect of the Load Resistance in the Linearity and Sensitivity of MIS Position Sensitive Detectors Aguas, H., Pereira, L., Raniero, L., Fortunato, E., Martins, R. Materials Research Society
4 国際会議録 Batch Processing Method to Deposit a-Si:H Films by PECVD Raniero, L., Aguas, H., Pereira, L., Fortunato, E., Ferreira, I., Martins, R. Trans Tech Publications	10 国際会議録 Insights on Amorphous Silicon Nip and MIS 3D Position Sensitive Detectors Martins, R., Costa, D., Aguas, H., Soares, F., Marques, A., Ferreira, I., Borges, P.M.R., Pereira, S., Raniero, L., … Trans Tech Publications
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