Influence of Substrate Temperature and Hydrogen Dilution Ratio on the Properties of Nanocrystalline Silicon Thin Films Grown by Hot-Wire Chemical Vapor Deposition
- 著者名:
Moutinho, H. R. Jiang, C. -S. Nelson, B. Xu, Y. Perkins, J. To, B. Jones, K. M. Romero, M. J. Al-Jassim, M. M. - 掲載資料名:
- Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 762
- 発行年:
- 2003
- 開始ページ:
- 571
- 終了ページ:
- 576
- 総ページ数:
- 6
- 出版情報:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996991 [1558996990]
- 言語:
- 英語
- 請求記号:
- M23500/762
- 資料種別:
- 国際会議録
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