Helium Versus Hydrogen Dilution of Silane in the Deposition of Polymorphous Silicon Films: Effects on the Structure and the Transport Properties
- 著者名:
Saadane, O. Lebib, S. Kharchenko, A. V. Suendo, V. Longeaud, C. Cabarrocas, P. Roca i - 掲載資料名:
- Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 762
- 発行年:
- 2003
- 開始ページ:
- 559
- 終了ページ:
- 564
- 総ページ数:
- 6
- 出版情報:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996991 [1558996990]
- 言語:
- 英語
- 請求記号:
- M23500/762
- 資料種別:
- 国際会議録
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6
国際会議録
Plasma Deposition of Silicon Clusters: A Way to Produce Silicon Thin Films With Medium-Range Order?
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