Correlation of Stress and Phase Evolution in Thin Ta Films on Si (100) During Thermal Testing
- 著者名:
- 掲載資料名:
- Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 750
- 発行年:
- 2003
- 開始ページ:
- 367
- 終了ページ:
- 372
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Penn: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996878 [1558996877]
- 言語:
- 英語
- 請求記号:
- M23500/750
- 資料種別:
- 国際会議録
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11
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EVOLUTION OF STRESS DURING INTERFACIAL REACTIONS BETWEEN Ni THIN FILMS AND (001) Si SUBSTRATES
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