Structural Quality and Electrical Behavior of Epitaxial High-k Y2O3/Si(001)
- 著者名:
Vellianitis, G. Apostolopoulos, G. Dimoulas, A. Argyropoulos, K. Mereu, B. Scholz, R. Alexe, M. Hooker, J. C. - 掲載資料名:
- Crystalline oxide-silicon heterostructures and oxide optoelectronics : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 747
- 発行年:
- 2003
- 開始ページ:
- 177
- 終了ページ:
- 182
- 総ページ数:
- 6
- 出版情報:
- Warrendale, PA: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996847 [1558996842]
- 言語:
- 英語
- 請求記号:
- M23500/747
- 資料種別:
- 国際会議録
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