Physical and Electrical Properties of Al2O3, HfO2, and Their Alloy Films Prepared by Atomic Layer Deposition for 65nm CMOS Gate Dielectric
- 著者名:
Kawahara, Takaaki Torii, Kazuyoshi Fukuda, Seiichi Maeda, Takeshi Horiuchi, Atsushi Ito, Hiroyuki Muto, Akiyoshi Kato, Yoshitake Kitajima, Hiroshi - 掲載資料名:
- Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 745
- 発行年:
- 2003
- 開始ページ:
- 155
- 終了ページ:
- 160
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996823 [1558996826]
- 言語:
- 英語
- 請求記号:
- M23500/745
- 資料種別:
- 国際会議録
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