Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications | 東京工業大学附属図書館文献データベース

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Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

著者名:

さらに 7 件

掲載資料名:

Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

741

発行年:

2003

開始ページ:

213

終了ページ:

218

総ページ数:

6

出版情報:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996786 [1558996788]

言語:

英語

請求記号:

M23500/741

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014401
シリーズID:	PA00000011
会議名:	Symposium on nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines
回次:	2002
会議開催地:	Boston, MA, USA
会議開催年:	2002.12.02-2002.12.04

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1 国際会議録 Strength of Ultrananocrystalline Diamond Thin Films-Identification of Weibull Parameters Peng, B., Espinosa, H. D., Moldovan, N., Xiao, X., Auciello, O., Carlisle, J. A., Gruen, D. M., Divan, R. S., Mancini, … Materials Research Society	7 国際会議録 Effects of Film Thickness on the Yielding Behavior of Polycrystalline Gold Films Espinosa, H.D., Prorok, B.C. Materials Research Society
2 国際会議録 Micromachining of ultrananocrystalline diamond Moldovan,N.A., Auciello,O.H., Sumant,A.V., Carlisle,J.A., Divan,R., Gruen,D.M., Krauss,A.R., Mancini,D.C., Jayatissa,A., … SPIE-The International Society for Optical Engineering	8 国際会議録 Electrical Properties of Thin Nitrogen-Doped Ultrananocrystalline Diamond Films Polyakov, V.I., Rukovishnikov, A.I., Pimenov, S.M., Carlisle, J.A., Gruen, D.M. Materials Research Society
3 国際会議録 Science and technology of ultrananocrystalline diamond (UNCD) thin films for multifunctional devices Auciello,O.H., Gruen,D.M., Krauss,A.R., Jayatissa,A., Sumant,A., Tucek,J., Mancini,D.C., Moldovan,N.A., Erdemir,A., … SPIE-The International Society for Optical Engineering	9 国際会議録 Quantum Chemical Studies of Growth Mechanisms of Ultrananocrystalline Diamond Curtiss, L.A., Zapol, P., Sternberg, M., Redfern, P.C., Homer, D.A., Gruen, D.M. Springer
4 国際会議録 Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties Sumant, A.V., Auciello, O., Krauss, A.R., Gruen, D.M., Ersoy, D., Tucek, J., Jayatissa, A., Stach, E., Moldovan, N., … Materials Research Society	10 国際会議録 Electronic Properties and Applications of Ultrananocrystalline Diamond Williams, O. A., Zimmermann, T., Kubovic, M., Denisenko, A., Kohn, E., Jackman, R. B., Gruen, D. M. Springer
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