Fabrication and characterisation of Silicon On Insulator substrates incorporating thermal vias.
- 著者名:
Bain, M.F. Baine, P. McNeill, D.W. Srinivasan, G. Jankovic, N. McCartney, J. Moore, R.A. Armstrong, B.M. Gamble, H.S. - 掲載資料名:
- Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 185
- 発行年:
- 2005
- 開始ページ:
- 103
- 終了ページ:
- 108
- 総ページ数:
- 6
- 出版情報:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402030116 [1402030118]
- 言語:
- 英語
- 請求記号:
- N17050/185
- 資料種別:
- 国際会議録
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