Annealing of Aluminum Implanted 4H-SiC: Comparison of Furnace and Lamp Annealing

Annealing of Aluminum Implanted 4H-SiC: Comparison of Furnace and Lamp Annealing

著者名:

掲載資料名:

Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy

シリーズ名:

Materials science forum

シリーズ巻号:

483-485

発行年:

2005

開始ページ:

621

終了ページ:

624

総ページ数:

4

出版情報:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499632 [0878499636]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014242
シリーズID:	PA00000012
会議名:	ECSCRM : European Conference on Silicon Carbide and Related Materials
回次:	2004 : 5th
会議開催地:	Bologna, Italy
会議開催年:	2004.08.31-2004.09.04

類似資料:

1 国際会議録 Extracting Activation and Compensation Ratio from Aluminum Implanted 4H-SiC by Modelling of Resistivity Measurements Rambach, M., Frey, L., Bauer, A.J., Ryssel, H. Trans Tech Publications	7 国際会議録 Influence of the Oxidation Temperature and Atmosphere on the Reliability of Thick Gate Oxides on the 4H-SiC C(000-1) Face M. Grieb, D. Peters, A.J. Bauer, P. Friedrichs, H. Ryssel Trans Tech Publications
2 国際会議録 High Temperature Implantation of Aluminum in 4H Silicon Carbide M. Rambach, A.J. Bauer, H. Ryssel Trans Tech Publications	8 国際会議録 Impact of Post-Trench Processing on the Electrical Characteristics of 4H-SiC Trench-MOS Structures with Thick Top and Bottom Oxides C.T. Banzhaf, M. Grieb, M. Rambach, A.J. Bauer, L. Frey Trans Tech Publications
3 国際会議録 Investigation of Rapid Thermal Annealed pn-Junctions in SiC Rambach, M., Weiss, R., Frey, L., Bauer, A.J., Ryssel, H. Trans Tech Publications	9 国際会議録 Wafer scale characterization of interface state densities without test structures by photocurrent analysis Rommel, M., Graft, M., Frey, L., Bauer, A. J., Ryssel, H. Electrochemical Society
4 国際会議録 Surface Properties and Electrical Characteristics of Rapid Thermal Annealed 4H-SiC Bauer, A.J., Rambach, M., Frey, L., Weiss, R., Rupp, R., Friedrichs, P., Schorner, R., Peters, D. Trans Tech Publications	10 国際会議録 Investigation of Trenched and High Temperature Annealed 4H-SiC C.T. Banzhaf, M. Grieb, A. Trautmann, A.J. Bauer, L. Frey Trans Tech Publications
5 国際会議録 Electrical Impact of the Aluminum P-Implant Annealing on Lateral MOSFET Transistors on 4H-SiC N-Epi S. Noll, D. Scholten, M. Grieb, A.J. Bauer, L. Frey Trans Tech Publications	11 国際会議録 Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap Jones, K.A., Shah, P.B., Derenge, M.A., Ervin, M.H., Gerardi, G.J., Freitas, J.A.,Jr., Braga, G.C.B., Vispute, R.D., … Trans Tech Publications
6 国際会議録 Influence of Annealing Parameters on Surface Roughness, Mobility and Contact Resistance of Aluminium Implanted 4H SiC H. Schmitt, V. Häublein, A.J. Bauer, L. Frey Trans Tech Publications	12 国際会議録 Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap Jones, K.A., Shah, P.B., Derenge, M.A., Ervin, M.H., Gerardi, G.J., Freitas, J.A., Jr., Braga, G.C.B., Vispute, R.D., … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12