Improved Resolution of Epitaxial Thin Film Doping Using FTIR Reflectance Spectroscopy
- 著者名:
Mazzola, M. S. Sunkari, S. G. Mazzola, J. P. Das, H. Melnychuk, G. Koshka, Y. Wyatt, J. L. Zhang, J. - 掲載資料名:
- Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 483-485
- 発行年:
- 2005
- 開始ページ:
- 397
- 終了ページ:
- 400
- 総ページ数:
- 4
- 出版情報:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499632 [0878499636]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
類似資料:
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
9
国際会議録
Use of SiCl4 as Silicon Precursor for Low-Temperature Halo-Carbon Epitaxial Growth of 4H-SiC
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |