The Texture and Property of Diffusion Barrier of TiN Thin Films
- 著者名:
Sung, D. Y. Kim, I. Lee, M. G. Yang, B. Yang, J. M. Ko, J. K. - 掲載資料名:
- PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 475-479(3)
- 発行年:
- 2005
- 開始ページ:
- 1865
- 終了ページ:
- 1868
- 総ページ数:
- 4
- 出版情報:
- Uetikon-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878499601 [0878499601]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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7
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