Blank Cover Image

Selective Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates Using Hexachlorodisilane and Propane

著者名:
掲載資料名:
Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999
シリーズ名:
Materials science forum
シリーズ巻号:
338-342(1)
発行年:
2000
開始ページ:
249
終了ページ:
252
総ページ数:
4
出版情報:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498543 [0878498540]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

類似資料:

Jacob, C., Pirouz, P., Nishino, S.

Trans Tech Publications

Wu, C.H., Chung, J., Hong, M.H., Zorman, C.A., Pirouz, P., Mehregany, M.

Trans Tech Publications

Jacob, Chacko, Chung, Juyong, Hong, Moon-Hi, Pirouz, Pirouz, Nishino, Shigehiro

Materials Research Society

Jacob, C., Pirouz, P., Kuo, H-I., Mehregany, M.

MRS - Materials Research Society

Okui, Y., Jacob, C., Ohshima, S., Nishino, S.

Trans Tech Publications

Hong, M. -H., Chung, J., Namavar, F., Pirouz, P.

Trans Tech Publications

Okui, Y., Jacob, C., Ohshima, S., Nishino, S.

Trans Tech Publications

Pirouz, P., Chorey, C. M., Cheng, T. T., Powell, J. A.

Materials Research Society

Wu, C.H., Chung, J., Hong, M.H., Zorman, C.A., Pirouz, P., Mehregany, M.

Trans Tech Publications

Teker, Kasif, Lee, Ki Hoon, Jacob, Chacko, Nishino, Shigehiro, Pirouz, Pirouz

Materials Research Society

Okui, Y., Jacob, C., Ohshima, S., Nishino, S.

Trans Tech Publications

Nishino, S., Masuda, Y., Ohshima, S., Jacob, C.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12