Micropipe Healing in Liquid Phase Epitaxial Growth of SiC

Micropipe Healing in Liquid Phase Epitaxial Growth of SiC

著者名:

Yakimova, R.

掲載資料名:

Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999

シリーズ名:

Materials science forum

シリーズ巻号:

338-342(1)

発行年:

2000

開始ページ:

237

終了ページ:

240

総ページ数:

4

出版情報:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498543 [0878498540]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014226
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials : ICSCRM
回次:	1999
会議開催地:	Research Triangle Park, North Carolina, USA
会議開催年:	1999.10.10-1999.10.15

類似資料:

1 国際会議録 Wetting Properties and Interfacial Energies in Liquid Phase Growth of α-SiC Yakimova,R., Syvajarvi,M., Janzen,E. Trans Tech Publications	7 国際会議録 High Growth Rate Epitaxy of Thick 4H-SiC Layers Syvajarvi, M., Yakimova, R., Jacobsson, H., Linnarsson, M. K., Henry, A., Janzen, E. Trans Tech Publications
2 国際会議録 Defect Energetics in 4H-SiC Sublimation Epi-Layers Grown on LPE Buffers With Reduced Micropipe Density Yakimova, R., Syvaejaervi, M., Jacobsson, H., Kakanakova-Georgieva, A., Tuomi, T., Rendakova, S., Dmitriev, V., Janzen, … Materials Research Society	8 国際会議録 High Quality 6H- and 4H-SiC pn Structures with Stable Electric Breakdown Grown by Liquid Phase Epitaxy Rendakova,S., Ivantsov,V., Dmitriev,V. Trans Tech Publications
3 国際会議録 Power Schottky and p-n Diodes on SiC Epi-Wafers with Reduced Micropipe Density Syrkin, A., Dmitriev, V., Yakimova, R., Henry, A., Janzen, E. Trans Tech Publications	9 国際会議録 Silicon Carbide Epitaxial Layers Grown on SiC Wafers With Reduced Micropipe Density Rendakova, S., Kuznetsov, N., Savkina, N., Rastegaeva, M., Andreev, A., Minbaeva, M., Morozov, A., Dmitriev, V. MRS - Materials Research Society
4 国際会議録 Power Schottky and p-n Diodes on SiC Epi-Wafers with Reduced Micropipe Density Syrkin, A., Dmitriev, V., Yakimova, R., Henry, A., Janzen, E. Trans Tech Publications	10 国際会議録 Behavior of Micropipes during Growth in 4H-SiC Vouroutzis, N., Yakimova, R., Syvaejaervi, M., Jacobson, H., Stoemenos, J., Janzen, E. Trans Tech Publications
5 国際会議録 Behavior of Micropipes during Growth in 4H-SiC Vouroutzis, N., Yakimova, R., Syvajarvi, M., Jacobson, H., Stoemenos, J., Janzen, E. Trans Tech Publications	11 国際会議録 Characterization of Anisotropic Step-Bunching on As-Grown SiC Surfaces Syvajarvi, M., Yakimova, R., Iakimov, T., Janzen, E. Trans Tech Publications
6 国際会議録 Influence of Epitaxial Layer on SiC Schottky Diode Gas Sensors Operated under High-Temperature Conditions Nakagomi, S., Shinobu, H., Uneus, L., Lundstrom, I., Ekedahl, L.-G., Yakimova, R., Syvajarvi, M., Henry, A., Janzen, E., … Trans Tech Publications	12 国際会議録 Domain Occurrence in SiC Epitaxial Layers Grown by Sublimation Tuominen,M., Yakimova,R., Kakanakova-Georgieva,A., MacMillan,M.F., Syvajarvi,M., Janzen,E. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12