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Defect Population and Electrical Properties of Ar+-Laser Crystallized Polycrystalline Silicon Thin Films

著者名:
Christiansen, S.
Nerding, M.
Eder, C.
Andrae, G.
Falk, F.
Bergmann, J.
Ose, M.
Strunk, H.P.
さらに 3 件
掲載資料名:
Electron-emissive materials, vacuum microelectronics and flat-panel displsys : symposium held April 25-27 2000, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
621
発行年:
2001
開始ページ:
Q7.5
出版情報:
Pittsburgh, PA.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995291 [1558995293]
言語:
英語
請求記号:
M23500/621
資料種別:
国際会議録

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