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The Effects of the Mechanical Properties of the Confinement Material on Electromigration in Metallic Interconnects

著者名:
掲載資料名:
Polycrystalline metal and magnetic thin films-2000 : symposium held April 25-27, 2000, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
615
発行年:
2001
開始ページ:
G7.2/D10.2
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995239 [1558995234]
言語:
英語
請求記号:
M23500/615
資料種別:
国際会議録

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