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Smoothing Thin Films With Gas-Cluster Ion Beams

著者名:
Fenner, D.B.
Hautala, J.
Allen, L.P.
Greer, J.A.
Skinner, W.J.
Budnick, J.I.
さらに 1 件
掲載資料名:
Magnetic materials, structures and processing for information storage: symposium held April 24-27, 2000, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
614
発行年:
2001
開始ページ:
F10.3
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995222 [1558995226]
言語:
英語
請求記号:
M23500/614
資料種別:
国際会議録

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