Blank Cover Image

Ultra Low-k Inorganic Silsequioxane Films With Tunable Electrical And Mechanical Properties

著者名:
Deis, T.
Saha, C.
Moyer, E.S.
Chung, K.
Lin, Y.
Spaulding, M.J.
Albaugh, J.
Chen, W.
Bremmer, J.N.
さらに 4 件
掲載資料名:
Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
612
発行年:
2001
開始ページ:
D5.18
出版情報:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558995208 [155899520X]
言語:
英語
請求記号:
M23500/612
資料種別:
国際会議録

類似資料:

1 国際会議録 Structural Properties of Porous Ultra Low-k Thin Films

Chen, W., Deis, T.A., Liii, K., Brenuner, J.N., Lin, E.K., Gidley, D.W., Chiou, W-A.

Electrochemical Society
7 国際会議録 Electrical And Optical Properties Of ZnO:Al Thin Film

Keum, M.J., Yang, J.S., Son, I.H., Shin, S.K., Choi, H.W., Lee, W.S., Choi, M.K., Chu, S.N., Kim, K.H.

Materials Research Society
2 国際会議録 Plasma Treatment of Hydrogen Silsesquioxane (HSQ) Based Ultra Low-k Films

han, Q., Waldfried, C., Berry, I., Chen, W, Moyer, E.S., Liii, Y., Spaulding, M.I.

Electrochemical Society
8 国際会議録 IMPROVEMENTS ON ELECTRICAL PROPERTIES OF ULTRA-THIN SILCON OXIDES GROWN BY MICROWAVE AFTERGLOW OXYGEN PLASMA

Chen, P. C., Lin, J. Y., Hwang, H. L.

MRS - Materials Research Society
3 国際会議録 Structural and Electrical Characteristics of Low Dielectric Cosntant Porous Hydrogen Silsequioxane for Cu Metallization

Wang, J.H., Liu, P.T., Chang, T.C., Chen, W.J., Cheng, S.L., Lin, J.Y., Chen, L.J.

Electrochemical Society
9 国際会議録 Residual Stress, Mechanical Behavior and Electrical Properties of Cu/Nb Thin-Film Multilayers

Griffin, A. J., Jr., Embury, J. D., Hundley, M. F., Jervis, T. R., Kung, H. H., Scarborough, W. K., Walter, K. C., Wood, …

MRS - Materials Research Society
4 国際会議録 PHOTODEFINABLE BENZOCYCLOBUTENE FORMULATIONS FOR THIN FILM MICROELECTRONIC APPLICATIONS. III. 1 TO 20 MICRON PATTERNED FILMS

Moyer, E. S., Becker, G. S., Rutter, E. W., Jr., Radler, M., Bremmer, J. N., Bernius, M. T., Castillo, D., Strandjord, …

MRS - Materials Research Society
10 国際会議録 Study on Electrical and Thermal Properties of Epoxy Resin/Inorganic Filler Composites for the Fully Enclosed Casting Bus Bar and its Calculation of the …

N.K. Gao, Y.L. Wang, W.X. Zhang, Z. Liu, C. Chen

Trans Tech Publications
5 国際会議録 Plasma Curing Of Ultra Low-k Porous Silicon Dioxide Films

Han, Qingyuan, Chen, Wei, Waldfried, Carlo, Escorcia, Orlando, Bridgewater, Todd J., Moyer, Eric S., Berry, Ivan

Electrochemical Society
11 国際会議録 Rapid Thermal Processing of Hydrogen Silsesquioxane for Low-Dielectric Constant Performance

Bremmer, J. N., Gray, D., Gruszynski, K., Liu, Y., Marcus, S.

Materials Research Society
6 国際会議録 The Optical and Electrical Properties of AZO Films Deposited at Room Temperature

J.-C. Hsu, Y.-H. Lin, Y.-Y. Chen

Society of Vacuum Coaters
12 国際会議録 Evaluation of Mechanical Properties of Composite Materials Used in Dentistry Varying the Inorganic Composition

T.C.F. Melo-Silva, C.L. Melo-Silva, C.F. Carvalho, A.B. Teixeira, J.F.C. Lins

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12