Film Properties of Low-Density and Ultra-Low-Dielectric-Constant Material
- 著者名:
Arao, H. Egami, M. Komatsu, M. Muraguchi, R. Nakashima, A. Tounai, A. - 掲載資料名:
- Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 565
- 発行年:
- 1999
- 開始ページ:
- 63
- 終了ページ:
- 68
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994720 [1558994726]
- 言語:
- 英語
- 請求記号:
- M23500/565
- 資料種別:
- 国際会議録
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11
国際会議録
Physical Characterization of Ultrathin Films of High Dielectric Constant Materials on Silicon
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