Growth and Structure of Metallic Barrier Layers and Interconnect Films II: Atomistic Simulations of Film Deposition Onto Inclined Surfaces
- 著者名:
Baumann, F. H. DallaTorre, J. DiazdelaRubia, T. DjafariRouhani, M. Gilmer, G. H. Huang, H. Kalyanaraman, R. Windt, D. L. - 掲載資料名:
- Polycrystalline metal and magnetic thin films : symposium held April 5-8, 1999, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 562
- 発行年:
- 1999
- 開始ページ:
- 129
- 終了ページ:
- 134
- 総ページ数:
- 6
- 出版情報:
- Warrendale, PA: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994690 [1558994696]
- 言語:
- 英語
- 請求記号:
- M23500/562
- 資料種別:
- 国際会議録
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