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Investigation of the Role of Chemical-Mechanical Polishing in Improving the Performance of Polysilicon TFTs

著者名:
Armstrong, B. M.
Baine, P. T.
Gamble, H. S.
Lee, B.
Mitchell, S. J. N.
Quinn, L. J.
さらに 1 件
掲載資料名:
Flat-panel displays and sensors - principles, materials and processes : symposium held April 4-9, 1999, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
558
発行年:
2000
開始ページ:
257
終了ページ:
262
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558994652 [1558994653]
言語:
英語
請求記号:
M23500/558
資料種別:
国際会議録

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