A Novel Range of Noble Metal Organometallic Fluorides for Use in the Fabrication of Submicron Metal Features by E-Beam or UV Irradiation
- 著者名:
Berry, G.J. Cairns, J.A. Davidson, M.R. Fan, Y.C. Fitzgerald, A.G. Fzea, A.H. Lobban, J. McGivern, P. Thomson, J. - 掲載資料名:
- Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 546
- 発行年:
- 1999
- 開始ページ:
- 225
- 終了ページ:
- 230
- 総ページ数:
- 6
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994522 [1558994521]
- 言語:
- 英語
- 請求記号:
- M23500/546
- 資料種別:
- 国際会議録
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6
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Reaction of Alkali Metal Intercalated C60 with Oxygen: Deintercalation, Activation and Decomposition
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