Deep Reactive Ion Etching of Silicon
- 著者名:
Ayon, A.A. Chen, K-S. Lohner, K.A. Spearing, S.M. Sawin, H.H. Schmidt, M.A. - 掲載資料名:
- Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 546
- 発行年:
- 1999
- 開始ページ:
- 51
- 終了ページ:
- 62
- 総ページ数:
- 12
- 出版情報:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994522 [1558994521]
- 言語:
- 英語
- 請求記号:
- M23500/546
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Electrochemical Society |
MRS-Materials Research Society |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
Society of Vacuum Coaters |
MRS - Materials Research Society |
Electrochemical Society |
American Institute of Chemical Engineers |
SPIE-The International Society for Optical Engineering |