Blank Cover Image

THREE-DIMENSIONAL MONTE CARLO SIMULATION OF IMPLANTED BORON AND DAMAGE DISTRIBUTION IN CRYSTALLINE SILICON CONSIDERING MASK STRUCTURE

著者名:
掲載資料名:
State-of-the-art program on compound semiconductors XL (SOTAPOCS XL) and narrow bandgap optoelectronic materials and devices II : proceedings of the international symposia
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-4
発行年:
2004
開始ページ:
496
終了ページ:
508
総ページ数:
13
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770644 [1566770645]
言語:
英語
請求記号:
E23400/200402
資料種別:
国際会議録

類似資料:

Son, M.-S., Lee, J.-H., Byun, K.-R., Hwang, H.-J.

Electrochemical Society

Tian, S., Morris, M., Morris, S. J., Obradovic, B., Tasch, A. F.

MRS - Materials Research Society

Lee, J.-H., Son, M.-S., Hwang, H.-J

Electrochemical Society

Lavine, James P., Filo, A. J., Losee, D. L., Guidash, P. A., Lee, S.-T., Braunstein, G. H., Kosman, S. L., Kyan, H.

MRS - Materials Research Society

Lee, J.-H., Son, M.-S., Hwang, H.-J.

Electrochemical Society

Son, Myung-Sik, Hwang, Ho-Jung

MRS - Materials Research Society

Yang, S.-H., Morris, S., Tian, S., Parab, K., Tasch, A. F., Echenique, P. M., Capaz, R., Joannopoulos, J.

MRS - Materials Research Society

Huh, J.-S., Hwang, H.-R., Lee, K.-M., Byun, H.-G., Lim, J.-O.

Trans Tech Publications

Tian, S., Morris, M., Morris, S. J., Obradovic, B., Tasch, A. F.

MRS - Materials Research Society

Ohfuji,T., Kuwahara,N., Kurihara,M., Kitano,N., Fujimoto,S., Hayashi,N., Hwang,D.H.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12