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MODELING OF TRANSIENT ENHANCED DIFFUSION BASED ON EVOLUTION OF {311} DEFECTS

著者名:
掲載資料名:
State-of-the-art program on compound semiconductors XL (SOTAPOCS XL) and narrow bandgap optoelectronic materials and devices II : proceedings of the international symposia
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-4
発行年:
2004
開始ページ:
155
終了ページ:
163
総ページ数:
9
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770644 [1566770645]
言語:
英語
請求記号:
E23400/200402
資料種別:
国際会議録

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