Characterization of Novel Metal/AIN/Si Thin Film Structures as Hydrogen Sensor

Characterization of Novel Metal/AIN/Si Thin Film Structures as Hydrogen Sensor

著者名:

Mo, Wenjun

McCuIlen, Erik E

Prakasam, Haripnya E.

掲載資料名:

AIChE, sensor technology, conference proceedings : AIChE annual meeting, November 3-8, 2002, Indianapolis, Indiana

シリーズ名:

AIChE Conference Proceedings

シリーズ巻号:

P-172

発行年:

2002

開始ページ:

40

終了ページ:

47

総ページ数:

8

出版情報:

New York: American Institute of Chemical Engineers

ISBN:

9780816908912 [0816908915]

言語:

英語

請求記号:

A07755/200205

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014151
シリーズID:	PA00000008
会議名:	AIChE Annual Meeting
回次:	2002
会議開催地:	Indianapolis, IN, USA
会議開催年:	2002.11.03-2002.11.08

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