Selectively Etching GaAs/ AlxGa1-xAs Using a Buffered Citric Acid Etch
- 著者名:
- 掲載資料名:
- Proceedings of the Twenty-first State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXI)
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-34
- 発行年:
- 1994
- 開始ページ:
- 141
- 終了ページ:
- 146
- 総ページ数:
- 6
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770934 [1566770939]
- 言語:
- 英語
- 請求記号:
- E23400/950719
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society |
7
国際会議録
In Situ Etching and Chemical Beam Epitaxy of Carbon-Doped AlxGa1-xAs Using Trisdimethylaminoarsenic
Electrochemical Society |
Electrochemical Society |
Trans Tech Publications |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
国際会議録
GROWTH OF GaAs, InxGa1-xAs, AND AlxGa1-xAs ON GaAs(111)B SUBSTRATES BY MOLECULAR BEAM EPITAXY
Materials Research Society |