Comparison of Oxide Breakdown Mechanism Due to D-Defects and Oxygen Precipitates
- 著者名:
Park, J.G. Ushio, S. Takeno, H. Cho, K.-C. Kim, J.-K. Rozgonyi, G.A. - 掲載資料名:
- Proceedings of the Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-33
- 発行年:
- 1994
- 開始ページ:
- 53
- 終了ページ:
- 64
- 総ページ数:
- 12
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770927 [1566770920]
- 言語:
- 英語
- 請求記号:
- E23400/951106
- 資料種別:
- 国際会議録
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