The Development and Performance of an Electrostatic Chuck for Silicon Etches
- 著者名:
- 掲載資料名:
- Proceedings of the tenth symposium on plasma processing
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-20
- 発行年:
- 1994
- 開始ページ:
- 291
- 終了ページ:
- 299
- 総ページ数:
- 9
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770774 [1566770777]
- 言語:
- 英語
- 請求記号:
- E23400/941901
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
9
国際会議録
Stoichiometric and structural properties of pulsed-laser deposited BaTiO3 thin films on silicon
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
Materials Research Society |