Recent Developments In Ultrathin Oxynitride And Oxide/Nitride Stacked Films Prepared By In-Situ RTP Multiprocessing
- 著者名:
Bhat, M. Yoon, G.W. Kim, J. Han, L,K. Yan, J. Wristers, D. Kwong, D.L. - 掲載資料名:
- Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 1994-16
- 発行年:
- 1994
- 開始ページ:
- 317
- 終了ページ:
- 327
- 総ページ数:
- 11
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770484 [1566770483]
- 言語:
- 英語
- 請求記号:
- E23400/942240
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
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MRS - Materials Research Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
MRS - Materials Research Society |