Blank Cover Image

SiC SOI structures by direct carbonization conversion and direct growth from silacyclobutame

著者名:
掲載資料名:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-11
発行年:
1994
開始ページ:
117
終了ページ:
122
総ページ数:
6
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770439 [1566770432]
言語:
英語
請求記号:
E23400/941388
資料種別:
国際会議録

類似資料:

Chen,J., Steckl,A.J., Loboda,M.J.

Trans Tech Publications

Feng, T., Tong, Q-Y., Askinazi, J., Goesele, U.

Electrochemical Society

Chen, J., Steckl, A. J., Loboda, M. J.

Trans Tech Publications

Steckl, A.J., Su, J.N., Xu, J., Li, J.P., Yuan, C., Yih, P.H., Mogul, H.C.

Materials Research Society

Madapura, S., Steckl, A.J., Loboda, M.

Electrochemical Society

Hansen, D.M., Chung, G., Loboda, M.J.

Trans Tech Publications

Steckl, A.J., Li, J.P.

Materials Research Society

Roman V. Drachev, Darren M. Hansen, M.J. Loboda

Materials Research Society

Li, J.P., Steckl, A.J.

Materials Research Society

Lee, T.H., Tong, Q.Y., Chao, Y.L., Huang, L.J., Goesele, U.

Electrochemical Society

Reiche, M., Goesele, U., Tong, Q.-Y.

Electrochemical Society

MacMillan, M.F., Loboda, M.J., Chung, G., Carlson, E., Wan, J.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12