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SIMULATION OF BURIED LAYER EXPERIMENTS CONTAIN- ING ALL FOUR DOPANT SPECIES

著者名:
Ghaderi, K.
Hobler, G.
Budil, M.
Poetzl, H.
Pichler, P.
Ryssel, H.
Hansch, W.
Eisele, I.
Tian, C.
Stingeder, G.
さらに 5 件
掲載資料名:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-10
発行年:
1994
開始ページ:
613
終了ページ:
624
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770422 [1566770424]
言語:
英語
請求記号:
E23400/941387
資料種別:
国際会議録

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