Blank Cover Image

SURFACE CHARACTERIZATION OF HEAT TREATED SILICON WAFERS

著者名:
掲載資料名:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
1994-10
発行年:
1994
開始ページ:
237
終了ページ:
247
総ページ数:
11
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770422 [1566770424]
言語:
英語
請求記号:
E23400/941387
資料種別:
国際会議録

類似資料:

1 国際会議録 ELECTRICAL CHARACTERIZATION OF LASER/ENERGY-BEAM RECRYSTALLIZED THIN FILM SILICON-ON-INSULATOR (SOI)

Lee, E-H., Ruprecht, D. J.

North Holland
7 国際会議録 Experimental results with cryogenically cooled thin silicon crystal x-ray monochromators on high heat flux beamlines

Rogers,C.S., Mills,D.M., Lee,W.-K., Fernandez,P.B., Graber,T.

SPIE-The International Society for Optical Engineering
2 国際会議録 IRON GETTERING EFFICIENCY BY A POLYSILICON LAYER IN P-TYPE CZ SILICON

Lee, D.M., Mishra, K., Huber, W., Chevacharoenkul, S., Choi, S.P., Doh, I.H.

Electrochemical Society
8 国際会議録 Microwave Dielectric Loss Characterization of Silicon Carbide Wafers

Bogart, T., Everson, B., Gamble, R.D., Oslosky, E., Snyder, D.W., Furman, E., Perini, S., Lanagan, M.

Trans Tech Publications
3 国際会議録 High-speed noninterferometric nanotopographic characterization of Si wafer surfaces

Raymond, T.D., Neal, D.R., Topa, D.M., Schmitz, T.L.

SPIE-The International Society for Optical Engineering
9 国際会議録 Removing Surface Contaminants from Silicon Wafers to Facilitate EUV Optical Characterization

R.E. Robinson, R.L. Sandberg, D.D. Allred, A.L. Jackson, J.E. Johnson, W. Evans, T. Doughty, A.E. Baker, K. Adamson, A. …

Society of Vacuum Coaters
4 国際会議録 CHARACTERIZATION OF DENUDED ZONES IN SILICON WAFERS

Rath, H. J., Reffle, J., Huber, D., Eichinger, P., Iberl, F., Bernt, H.

Materials Research Society
10 国際会議録 SOLUTE BINDING AT VOID SURFACES IN SILICON AND GERMANIUM

Myers, S.M., Bishop, D.M., Follstaedt, D.M., Stein, H.J., Wampler, W.R.

Materials Research Society
5 国際会議録 ASSESSMENT OF METALLIC TRACE CONTAMINANTS ON SILICON WAFER SURFACES

rath, H. J., Stallhofer, P., Huber, D., Eichinger, P., Ruge, I.

Materials Research Society
11 国際会議録 Interaction of deuterium with internal surfaces in silicon

Myers,S.M., Follstaedt,D.M., Stein,H.J., Wampler,W.R.

Trans Tech Publications
6 国際会議録 THE CHARACTERIZATION OF 65 nm PARTICLES ON POLISHED SILICON WAFERS

K.-M. Bae, T.-W. Kim, J.-P. Lee, J. Binns

Electrochemical Society
12 国際会議録 Iron Diffusion Profile Studies by Surface Photo-Voltage for Silicon Iron Implanted Wafers After Rapid Thermal Anneal

I. Rapoport, P. Taylor, S. Kim, B. Orschel, W. Huber

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12